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Issue 132 July 2001
Inductive Sensors


by George Novacek

Start LVDT RevisitedThe WorksElectrical Interfaces Mechanical InterfacesThe FutureSources & PDF

LVDT REVISITED

In this article, I want to introduce you to another technology, the integrated inductive sensor developed by the Swiss company CSEM. What makes this sensor interesting is that in principle it is similar to the variable differential transformer, with the coils micro-machined on a chip. Photo 1 shows the sensor with its driver and decoder electronics encapsulated for protection. Photo 2 is a microscopic detail of the business end of the sensor.

Photo 1—The sensor module with its driver and decoder electronics is merely 0.35² × 1.18² and weighs approximately 0.7 grams.


Variable differential transformers and their cousins’ resolvers are robust and, when their output signals are digitized, can consistently provide 16-bit resolution. But the coil windings are large and heavy, and the required precision manufacturing is costly.

Photo 2—This is a microscopic detail of the sensor part. You can see the large octagonal excitation coil, which is about 0.15² (3.8 mm) across. The four smaller sensing coils below it are faintly visible.

The size and weight are concerns for many reasons. In the transportation industry, the long-standing maxim is that the cheapest way to improve efficiency and performance is by reducing weight. Lower weight and smaller size make it possible to install sensors in previously impossible locations and make their mounting less demanding. Their mechanical characteristics, such as response time and ability to sustain vibrations are greatly improved. Small size also improves EMI characteristics, both emission and susceptibility, resulting in reduced shielding requirements and further size and weight reduction. [1–5]

On the manufacturing side, unlike the old-fashioned coil winding, precision, repeatability, and low cost (with high volume) are inherent to the micro-machining process, and hardly achievable by traditional manufacturing methods (just as the miniature size and weight).